Effects of Redox Treatment on Diamondlike Carbon Coated Mo Substrates
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-02-01
著者
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Yokoyama Meiso
Department of Electrical Engineering, National Cheng Kung University
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LIN Chin-Maw
Department of Electrical Engineering, National Cheng Kung University
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CHANG Shoou-Jinn
Department of Electrical Engineering, National Cheng Kung University
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Chang S‐j
Department Of Electrical Engineering National Cheng-kung University
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Lin C‐m
Taiwan Semiconductor Manufacturing Co. Ltd. Hsin‐chu Twn
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Yokoyama M
Kawasaki Heavy Ind. Ltd. Chiba Jpn
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Yokoyama Meiso
Department Of Electrical Engineering National Cheng Kung University
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Chang Shoou-jinn
Department Of Electrical Engineering National Cheng Kung University
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LIN Nan
Materials Science Center, National Tsing Hua Univesrity
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Lin Nan
Materials Science Center National Tsing Hua Univesrity
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