Ultraviolet-Patternable Polymer Insulator for Organic Thin-Film Transistors on Flexible Substrates
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概要
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In this work, we describe the fabrication of pentacene-based organic thin-film transistors (OTFTs) on a flexible substrate using a UV-patternable polymer material, mr-UVCur06, as the gate insulator. The device structure is poly(ethylene terephthalate) (PET)/indium--tin oxide (ITO)/mr-UVCur06/pentacene/Au (source/drain). In addition to its solution-processable capability, mr-UVCur06 is directly patternable by UV light in a low-temperature process. The OTFT has an on--off ratio that approaches $10^{5}$, and its pattern resolution can reach 5 μm. Additionally, UV/ozone post-treatment of the patterned mr-UVCur06 can illuminate the organic contaminants from its surface and significantly improve the performance of OTFTs. Moreover, the effect of UV/ozone post-treatment on the polymer dielectric is confirmed using a Fourier transform infrared (FT-IR) spectrometer. Owing to its highly desired characteristics such as photopatternability and low-temperature process, mr-UVCur06 is feasible for low-cost, large-area flexible device applications.
- 2011-04-25
著者
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Wu Chung-ming
Department Of Electronic Engineering
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Fu Shen-li
Department Of Electrical Engineering National Cheng Kung University
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Yokoyama Meiso
Department Of Electrical Engineering National Cheng Kung University
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SU Shui-Hsiang
Department of Electronic Engineering
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Wang Hong-Tai
Department of Electronic Engineering, I-Shou University, Kaohsiung County 840, Taiwan
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Fu Shen-Li
Department of Electronic Engineering, I-Shou University, Kaohsiung County 840, Taiwan
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