Impact of Thermal Stability on the Characteristics of Complementary Metal Oxide Semiconductor Transistors with TiN Metal Gate

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-02-15

著者

• Huang T‐y

  National Chiao Tung Univ. Hsinchu Twn

• Chien C‐h

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Instiute Of Electronics National Chiao-tang University

• Chang Chun-yen

  Department Of The Electro-optical Engineering National Chiao Tung University

• HUANG Tiao-Yuan

  Institute of Electronics, National Chiao Tung University

• HUANG Tiao-Yuan

  National Nano Device Laboratory

• LIN Horng-Chih

  National Nano Device Labs.

• Huang T-y

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• WANG Meng-Fan

  Institute of Electronics, National Chiao-Tung Universiry

• KAO Ya-Chen

  Institute of Electronics, National Chiao-Tung University

• Huang Tiao-yuan

  Institute Of Electronics National Chiao Tung University:national Nano Device Laboratories

• Huang Tiao-yuan

  Institute Of Electronics National Chiao Tung University

• Lin H‐c

  National Nano Device Laboratories

• Lin Horng-chih

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Lin Horng-chih

  Institute Of Electronics National Chiao Tung University

• Lin Horng-chih

  National Nano Device Lab.

• Wang M‐f

  Institute Of Electronics National Chiao-tung Universiry

• Kao Ya-chen

  Institute Of Electronics National Chiao-tung University

• Wang Meng-fan

  Institute Of Electronics National Chiao-tung Universiry

• Wang Meng-feng

  Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Institute Of Electronics National Chiao Tang University:national Nano-device Laboratories

• Lin Horng-chih

  National Chiao Tung University

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