Monte Carlo Sphere Model for Effective Oxide Thinning Induced Extrinsic Breakdown
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-04-30
著者
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Liang M‐s
Taiwan Semiconductor Manufacturing Co. Hsinchu Twn
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Liang Mong-song
Taiwan Semiconductor Manufacturing Company
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Liang Mong-song
R&d Department Taiwan Semiconductor Manufacturing Company
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Su Chi-wen
R&d Department Taiwan Semiconductor Manufacturing Company
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LIANG Mong-Song
R&D Department, Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park
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Chen Jyh-huei
R&d Department Taiwan Semiconductor Manufacturing Company
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Lin M‐s
Taiwan Semiconductor Manufacturing Company
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Hou Chin-shan
Institute Of Optical Sciences National Central University
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HUANG Huan-Tsung
Department of Electronics Engineering, National Chiao-Tung University
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CHEN Ming-Jer
Department of Electronics Engineering, National Chiao-Tung University
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CHEN Jyh-Huei
R&D Department, Taiwan Semiconductor Manufacturing Company
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SU Chi-Wen
R&D Department, Taiwan Semiconductor Manufacturing Company
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HOU Chin-Shan
R&D Department, Taiwan Semiconductor Manufacturing Company
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Huang Huan-tsung
Department Of Electronics Engineering National Chiao-tung University
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Chen Ming-jer
Department Of Electronics Engineering National Chiao-tung University
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- Monte Carlo Sphere Model for Effective Oxide Thinning Induced Extrinsic Breakdown
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