Low-dislocation AlGaN thin films grown using Al_<1-x>Si_xN nano-disks (x=0.07-0.17)
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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MAKIMOTO Toshiki
NTT Basic Research Laboratories, NTT Corporation
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Kasu Makoto
Ntt Basic Research Laboratories Ntt Corporation
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Kasu Makoto
Ntt Basic Research Laboratories
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AKASAKA Tetsuya
NTT Basic Research Laboratories, NTT Corporation
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TANIYASU Yoshitaka
NTT Basic Research Laboratories, NTT Corporation
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Taniyasu Yoshitaka
Ntt Basic Research Laboratories Ntt Corporation
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Akasaka Tetsuya
Ntt Basic Research Laboratories Ntt Corporation
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Makimoto Toshiki
Ntt Basic Laboratories Ntt Corporation
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Akasaka Tetsuya
NTT Basic Research Laboratories
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