Enhancement and Stabilization of Hole Concentration of Hydrogen-Terminated Diamond Surface Using Ozone Adsorbates
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概要
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The p-type conductivity of H-terminated diamond surface can be linked to adsorption of a specific gas species on the surface. O3, NO2, NO, and SO2 were identified as adsorbates, which induce holes on the H-terminated diamond surface. Among them, exposure to O3 increases hole concentration the most. The O3-increased concentration remains high even after exposure to the gas has stopped, indicating that ozone is the most stable adsorbent. X-ray photospectroscopy spectra of O3-adsorbed H-terminated diamond surface show partial oxidation of the surface and upward band bending and are very similar to those of NO2 exposed diamond surfaces.
- 2010-11-25
著者
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Kasu Makoto
Ntt Basic Research Laboratories
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Kubovic Michal
Ntt Basic Research Laboratories
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Kubovic Michal
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kasu Makoto
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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