Investigation of the Decomposition Process of Ga Organometals in MOCVD by the Surface Photo-Absorption Method
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概要
- 論文の詳細を見る
Surface photo-absorption (SPA) is a newly developed in situ optical monitoring technique for the epitaxial growth process. This method is based on the measurement of reflection intensity of p-polarized incident light at close to the Brewster angle. This letter describes use of SPA to investigate the decomposition of Ga organometals in metalorganic chemical vapor deposition during the growth of GaAs layers. Triethylgallium and trimethylgallium are used as the gallium sources, and the temperature range is 300℃-670℃. It is found that the SPA signal is very sensitive to chemical species on the growing surface, and that triethylgallium decomposes almost completely on the growisng surface above 500℃ while trimethylgallium does not completely decompose even at 630℃. The results imply that the self-limiting characteristic of the growth rate in atomic layer epitaxy is caused by the formation of a molecular layer of methylgallium compounds.
- 社団法人応用物理学会の論文
- 1990-04-20
著者
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MAKIMOTO Toshiki
NTT Basic Research Laboratories, NTT Corporation
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Yamauchi Yoshibumi
Deparment Of Electrical And Electronic Engineering Iwate University
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HORIKOSHI Yoshiji
NTT Basic Research Laboratories
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YAMAUCHI Yoshiharu
NTT Basic Research Laboratories, NTT Corporation
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KOBAYASHI Naoki
NTT Basic Research Laboratories
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HORIKOSHI Yoshiji
NTT Electrical Communications Laboratories
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Horikoshi Yoshiji
Ntt Basic Research Laboratories:(present Address) School Of Science And Engineering Waseda Universit
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Horikoshi Yoshiji
Ntt Electrial Communication Laboratories
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Horikoshi Y
Department Of Electrical Electronics And Computer Engineering School Of Science And Engineering Wase
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Yamauchi Y
Shizuoka Inst. Sci. And Technol. Fukuroi Jpn
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Makimoto Toshiki
Ntt Basic Laboratories Ntt Corporation
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Makimoto T
Ntt Basic Research Laboratories
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Yamauchi Yoshiharu
Ntt Basic Research Laboratories
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Kobayashi Naoki
Ntt Basic Laboratories Ntt Corporation
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Horikoshi Yoshiji
NTT Basic Reseach Laboratories
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