In Situ Spectrum Observation of Ga Deposition Process during GaAs Metal-Organic Chemical Vapor Deposition Using Surface Photo-Absorption

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-10-01

著者

• Yamauchi Yoshibumi

  Deparment Of Electrical And Electronic Engineering Iwate University

• YAMAUCHI Yoshiharu

  NTT Basic Research Laboratories, NTT Corporation

• KOBAYASHI Naoki

  NTT Basic Research Laboratories

• UWAI Kunihiko

  NTT Basic Research Laboratories

• Uwai K

  Ntt Basic Research Laboratories

• Yamauchi Y

  Shizuoka Inst. Sci. And Technol. Fukuroi Jpn

• Yamauchi Yoshiharu

  Ntt Basic Research Laboratories

• Kobayashi Naoki

  Ntt Basic Laboratories Ntt Corporation

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