In Situ Spectrum Observation of Ga Deposition Process during GaAs Metal-Organic Chemical Vapor Deposition Using Surface Photo-Absorption
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-10-01
著者
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Yamauchi Yoshibumi
Deparment Of Electrical And Electronic Engineering Iwate University
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YAMAUCHI Yoshiharu
NTT Basic Research Laboratories, NTT Corporation
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KOBAYASHI Naoki
NTT Basic Research Laboratories
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UWAI Kunihiko
NTT Basic Research Laboratories
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Uwai K
Ntt Basic Research Laboratories
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Yamauchi Y
Shizuoka Inst. Sci. And Technol. Fukuroi Jpn
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Yamauchi Yoshiharu
Ntt Basic Research Laboratories
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Kobayashi Naoki
Ntt Basic Laboratories Ntt Corporation
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