Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
スポンサーリンク
概要
- 論文の詳細を見る
- 2006-09-13
著者
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KIKKAWA Takamaro
MIRAI, Advanced Semiconductor Research Center, AIST
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吉川 公麿
広島大学:産業総合研究所
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Kawahara J
Assoc. Super-advanced Electronics Technol. (aset) Ibaraki Jpn
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Kawahara Jun
Mirai-association Of Super-advanced Electronics Technology (aset)
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YOSHINO Takenobu
MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien
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HATA Nobuhiro
MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien
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SHISHIDA Yoshinori
MIRAI-Association of Super-Advanced Electronics Technology (ASET)
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Hata Nobuhiro
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And
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Hata Nobuhiro
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Science And Technology
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Yoshino Takenobu
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And
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Kikkawa Takamaro
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And
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Kikkawa Takamaro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Shishida Yoshinori
Mirai-association Of Super-advanced Electronics Technologies
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Hata Nobuhiro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Kikkawa Takamaro
Millenium Research For Advanced Information Technology (mirai)-asrc Aist
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Hata Nobuhiro
Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technol
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Shishida Yoshinori
MIRAI—Association of Super-Advanced Electronics Technology (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Yoshino Takenobu
MIRAI—Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8569, Japan
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Kawahara Jun
MIRAI—Association of Super-Advanced Electronics Technology (ASET), Tsukuba, Ibaraki 305-8569, Japan
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