Electrical Characteristics of Mesoporous Pure-Silica–Zeolite Film
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概要
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The dependence of the electrical characteristics of hydrothermally crystallized pure-silica–zeolite films on the water concentration in the precursor was investigated. Zeolite was crystallized in a silica–zeolite composite film after spin-coating the precursor, which was composed of tetraethylorthosilicate, tetrabutylammonium hydroxide, ethylalcohol, and deionized (DI) water, followed by calcinations at 400 °C. The results of Fourier-transform infrared (FT-IR) spectroscopy indicated that the number of Si–OH and O–H bonds decreased with an increase in the water concentration in the precursor. The dielectric constant of the film decreased with an increase in water concentration, while the leakage current increased.
- 2007-09-15
著者
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Hata Nobuhiro
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And
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Yoshino Takenobu
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Science And
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Cho Yoshinori
Research Center for Nanodevices and Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan
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Cho Yoshinori
Research Center for Nanodevices and Systems, Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan
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Seo Toshiki
Research Center for Nanodevices and Systems, Hiroshima University, 1-4-2 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan
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Kikkawa Takamaro
Research Center for Nanodevice and Systems (RCNS), Hiroshima University, Higashihiroshima, Hiroshima 739-8527, Japan
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