Mechanical Property and Network Structure of Porous Silica Films
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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SEINO Yutaka
MIRAI, Advanced Semiconductor Research Center, AIST
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KIKKAWA Takamaro
MIRAI, Advanced Semiconductor Research Center, AIST
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HATA Nobuhiro
MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien
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Yamada K
Mirai Association Of Super-advanced Electronics Technologies (aset)
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YAMADA Kazuhiro
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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OKU Yoshiaki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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TAKADA Syozo
Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and
関連論文
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- Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
- Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique
- Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-k Organic Polymers
- Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores
- Mechanical Property and Network Structure of Porous Silica Films
- Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
- Control of Pore Structures in Periodic Porous Silica Low-k Films
- Mechanical Property Determination of Thin Porous Low-k Films by Twin-Transducer Laser Generated Surface Acoustic Waves
- Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films
- Influences of Skeletal Structure and Porosity on Dielectric and Mechanical Properties of Porous Organosilica Low-k Films
- Compact Integrated Folded Solc Filter using Periodic 90°-Domain Structures in KNbO_3 Single Crystals
- Total Refraction of P-Polarized Light at the Boundary of 90°-Domains in the Ferroelectric Crystal
- Wide Acceptance Angle of Second-Harmonic Green Generation by Periodically Poled Potassium Niobate
- Embryonic Nucleation Method for Fabrication of Uniform Periodically Poled Structures in Potassium Niobate for Wavelength Conversion Devices
- Direct Observation of Electromigration and Induced Stress in Cu Nanowire
- Transient Capacitance Spectroscopy of Copper-Ion-Drifted Methylsilsesquiazane-Methylsilsesquioxane Interlayer Dielectrics
- Role of Frictional Force on the Polishing Rate of Cu Chemical Mechanical Polishing
- Determination of mechanical properties of porous silica low-k films on Si substrates using orientation dependence of surface acoustic wave
- Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
- The structural origin of determining the coefficient of thermal expansion for porous silica low-k films
- Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy
- Infrared Complex Dielectric Function Analysis for Chemical Bonding Structure of Porous Silica Low Dielectric Constant Films
- Adsorption in-situ Spectroscopic Ellipsometry Analysis of Disordered Porous Silica Low-k Films
- Electrical Characteristics of Porous Zeolite Interlayer Dielectrics
- Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry