Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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KIKKAWA Takamaro
MIRAI, Advanced Semiconductor Research Center, AIST
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吉川 公麿
広島大学:産業総合研究所
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HATA Nobuhiro
MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien
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MIYOSHI Hidenori
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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Miyoshi Hidenori
Mirai Association Of Super-advanced Electronics Technologies (aset)
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