Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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TANAKA Hirofumi
MIRAI, Association of Super-Advanced Electronics Technologies
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KIKKAWA Takamaro
MIRAI, Advanced Semiconductor Research Center, AIST
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HATA Nobuhiro
MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien
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MIYOSHI Hidenori
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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Yamada K
Mirai Association Of Super-advanced Electronics Technologies (aset)
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MATSUO Hisanori
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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YAMADA Kazuhiro
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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OKU Yoshiaki
MIRAI, Association of Super-Advanced Electronics Technologies (ASET)
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TAKADA Syozo
Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and
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Oku Yoshiaki
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Matsuo Hisanori
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Yamada Kazuhiro
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Miyoshi Hidenori
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Kikkawa Takamaro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Matsuo H
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Hata Nobuhiro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Takada Syozo
Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Science And Technology
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Tanaka Hirofumi
Mirai Association Of Super-advanced Electronics Technologies
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- Plasma Etch Rates of Porous Silica Low-$k$ Films with Different Dielectric Constants
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