Control of Pore Structures in Periodic Porous Silica Low-k Films

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-04-15

著者

• KIKKAWA Takamaro

  MIRAI, Advanced Semiconductor Research Center, AIST

• HATA Nobuhiro

  MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien

• Yamada K

  Mirai Association Of Super-advanced Electronics Technologies (aset)

• YAMADA Kazuhiro

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET)

• NEGORO Chie

  ASRC, AIST

• Negoro Chie

  Asrc Aist

関連論文

• Simple Models on Enhancement of Mechanical Properties of Porous Silica Low-k Films by Tetramethylcyclotetrasiloxane(TMCTS) Vapor Annealing Treatment
• Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
• Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique
• Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-k Organic Polymers
• Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores
• Mechanical Property and Network Structure of Porous Silica Films
• Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
• Control of Pore Structures in Periodic Porous Silica Low-k Films
• Mechanical Property Determination of Thin Porous Low-k Films by Twin-Transducer Laser Generated Surface Acoustic Waves
• Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films
• Compact Integrated Folded Solc Filter using Periodic 90°-Domain Structures in KNbO_3 Single Crystals
• Total Refraction of P-Polarized Light at the Boundary of 90°-Domains in the Ferroelectric Crystal
• Wide Acceptance Angle of Second-Harmonic Green Generation by Periodically Poled Potassium Niobate
• Embryonic Nucleation Method for Fabrication of Uniform Periodically Poled Structures in Potassium Niobate for Wavelength Conversion Devices
• Direct Observation of Electromigration and Induced Stress in Cu Nanowire
• Transient Capacitance Spectroscopy of Copper-Ion-Drifted Methylsilsesquiazane-Methylsilsesquioxane Interlayer Dielectrics
• Role of Frictional Force on the Polishing Rate of Cu Chemical Mechanical Polishing
• Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
• The structural origin of determining the coefficient of thermal expansion for porous silica low-k films
• Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy
• Infrared Complex Dielectric Function Analysis for Chemical Bonding Structure of Porous Silica Low Dielectric Constant Films
• Adsorption in-situ Spectroscopic Ellipsometry Analysis of Disordered Porous Silica Low-k Films
• Electrical Characteristics of Porous Zeolite Interlayer Dielectrics
• Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry
• Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
• Control of Pore Structures in Periodic Porous Silica Low-$k$ Films

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