Direct Observation of Electromigration and Induced Stress in Cu Nanowire
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2003-12-01
著者
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KIZUKA Tokushi
Institute of Materials Science, University of Tsukuba
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KIKKAWA Takamaro
MIRAI, Advanced Semiconductor Research Center, AIST
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Fujisawa Satoru
National Institute Of Advanced Industrial Science And Technology(aist)
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Kikkawa Takamaro
Mirai Project Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industria
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