Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-04-15

著者

• HATA Nobuhiro

  MIRAI-Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Scien

• Yamada K

  Mirai Association Of Super-advanced Electronics Technologies (aset)

• YAMADA Kazuhiro

  MIRAI, Association of Super-Advanced Electronics Technologies (ASET)

• NEGORO Chie

  ASRC, AIST

• KIKKAWA Takamaro

  RCNS, Hiroshima Univ.

関連論文

• Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
• Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-k Organic Polymers
• Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores
• Mechanical Property and Network Structure of Porous Silica Films
• Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
• Control of Pore Structures in Periodic Porous Silica Low-k Films
• Mechanical Property Determination of Thin Porous Low-k Films by Twin-Transducer Laser Generated Surface Acoustic Waves
• Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films
• Compact Integrated Folded Solc Filter using Periodic 90°-Domain Structures in KNbO_3 Single Crystals
• Total Refraction of P-Polarized Light at the Boundary of 90°-Domains in the Ferroelectric Crystal
• Wide Acceptance Angle of Second-Harmonic Green Generation by Periodically Poled Potassium Niobate
• Embryonic Nucleation Method for Fabrication of Uniform Periodically Poled Structures in Potassium Niobate for Wavelength Conversion Devices
• Transient Capacitance Spectroscopy of Copper-Ion-Drifted Methylsilsesquiazane-Methylsilsesquioxane Interlayer Dielectrics
• Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
• Electrical Characteristics of Porous Zeolite Interlayer Dielectrics
• Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry
• Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
• Control of Pore Structures in Periodic Porous Silica Low-$k$ Films

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