Theoretical Investigation into Effects of Pore Size and Pore Position Distributions on Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films
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概要
- 論文の詳細を見る
The effects of the pore size distribution (psd) and pore position distribution (ppd) of two-dimensional (2D) periodic porous silica films on dielectric constant ($k$) and elastic modulus ($E$) were investigated by theoretical calculations. It was found that such porous silica films with a wider psd or a wider ppd show lower $E$ value than 2D hexagonal periodic porous silica films with an identical pore size. Careful control of pore structure is necessary for obtaining ultralow-$k$ porous silica films with a high $E$.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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Miyoshi Hidenori
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Kikkawa Takamaro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Hata Nobuhiro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Miyoshi Hidenori
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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