Molecular Orbital Calculation of the Elastic Modulus and the Dielectric Constant for Ultra Low-$k$ Organic Polymers
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概要
- 論文の詳細を見る
We propose a new theoretical calculation method for estimating the (Young’s) elastic modulus $E$ as well as the dielectric constant $k$ of low-$k$ films using a molecular orbital method. Co-oligomers of tricyclo[6.2.0.03,6]deca-1(8),2,6-triene (TCDT) and divinylbenzene (DVB) were investigated by applying this new calculation method to evaluate both $k$ and $E$. It is shown that organic low-$k$ films with $k<2.0$ and high elastic modulus are synthesized through the copolymerization reactions of TCDT and para-DVB. The molecular orbital method was demonstrated as a powerful tool for designing molecular structures of ultra low-$k$ films with high elastic modulus.
- 2004-02-15
著者
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Kawahara Jun
Mirai-association Of Super-advanced Electronics Technology (aset)
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UERA Kazuyoshi
Advanced Semiconductor Research Center (ASRC)
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Miyoshi Hidenori
Mirai Association Of Super-advanced Electronics Technologies (aset)
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Kikkawa Takamaro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Hata Nobuhiro
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Hata Nobuhiro
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Kawahara Jun
MIRAI, Association of Super-Advanced Electronics Technologies (ASET), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Kawahara Jun
MIRAI—Association of Super-Advanced Electronics Technology (ASET), Tsukuba, Ibaraki 305-8569, Japan
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Kikkawa Takamaro
MIRAI, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Uera Kazuyoshi
Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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