Preferential Nucleation of Nanocrystalline Silicon along Microsteps
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Kawahara J
Assoc. Super-advanced Electronics Technol. (aset) Ibaraki Jpn
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OTOBE Masanori
Research Center for Quantum Effect Electronics and Department of Physical Electronics, Tokyo Institu
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KAWAHARA Jun
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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ODA Shunri
PRESTO, JRDC
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Kawahara Jun
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
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Otobe M
Research Center For Quantum Effect Electronics And Department Of Physical Electronics Tokyo Institut
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Oda Shunri
Presto Jrdc
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Otobe Masanori
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
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- Preferential Nucleation of Nanocrystalline Silicon along Microsteps
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