Hata Nobuhiro | Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And Technol

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著作論文

Plasma-enhanced polymerization thin films as a drift barrier for Cu interconnects
Mechanical Strength of Multilayered Dielectric Structures Measured by Laser-Pulse Generated Surface-Acoustic-Wave Technique
Mechanical Property Determination of Thin Porous Low-k Films by Twin-Transducer Laser Generated Surface Acoustic Waves
Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films
Effect of Phosphorus Atom in Self-Assembled Monolayer as a Drift Barrier for Advanced Copper Interconnects
Influences of Skeletal Structure and Porosity on Dielectric and Mechanical Properties of Porous Organosilica Low-k Films
Determination of mechanical properties of porous silica low-k films on Si substrates using orientation dependence of surface acoustic wave
Nondestructive characterization of dielectric stack structures by laser-pulse-generated surface acoustic wave analysis
The structural origin of determining the coefficient of thermal expansion for porous silica low-k films
Nondestructive characterization of temperature-dependent backbone Si-O-Si structure in porous silica films by in-situ Fourier-transform infrared spectroscopy
Infrared Complex Dielectric Function Analysis for Chemical Bonding Structure of Porous Silica Low Dielectric Constant Films
Adsorption in-situ Spectroscopic Ellipsometry Analysis of Disordered Porous Silica Low-k Films
Comparison of Pore Shape Models for Small Angle X-ray Scattering of a Disordered Porous Silica Low-k Film
Electrical Characteristics of Porous Zeolite Interlayer Dielectrics
Microstructure Characterization of Skeletal Silica in Porous Low-k Films by Infrared Spectroscopic Ellipsometry

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