Characterization of the Co-Silicide Penetration Depth into the Junction Area for 0.15 and Sub-0.15 Micron CMOS Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-04-30

著者

• Park S‐h

  Magnachip Semiconductor Inc.

• JI Hee-Hwan

  Department of Electronics Engineering, Chungnam National University

• LEE Hi-Deok

  Department of Electronics Engineering, Chungnam National University

• BAE Mi-Suk

  Department of Electronics Engineering, Chungnam National University

• LEE Key-Min

  Memory R&D Division, Hynix Semiconductor Co.

• PARK Seong-Hyun

  Memory R&D Division, Hynix Semiconductor Co.

• JANG Myoung-Jun

  Memory R&D Division, Hynix Semiconductor Co.

• LEE Joo-Hyoung

  Memory R&D Division, Hynix Semiconductor Co.

• YOON Ki-Seok

  Memory R&D Division, Hynix Semiconductor Co.

• CHO Jung-Hoon

  Memory R&D Division, Hynix Semiconductor Co.

• PARK Geun-Suk

  Memory R&D Division, Hynix Semiconductor Co.

• KANG Keun-Koo

  Department of Physics, Chungbuk Nataional University

• PARK Young-Jin

  Memory R&D Division, Hynix Semiconductor Co.

• Park S‐h

  Yonsei Univ. Seoul Kor

• Park S‐h

  Hynix Semiconductor Choongbuk Kor

• Lee Hi-deok

  R&d Division Lg Semicon Co. Ltd.

• Lee Hi-deok

  Advanced Technology Laboratory Lg Semicon Co. Ltd.

• Lee Hi-deok

  Advanced Technology Laboratory. Lg Semicon Co.

• Lee Hi-deok

  Department Of Electronics Engineering Chungnam National University

• Park Seong-hyun

  Magnachip Semiconductor Inc.

• Jang M‐j

  Hynix Semiconductor Co. Choongbuk Kor

• Jang Myoung-jun

  Memory R&d Division Hynix Semiconductor Co.

• Lee Joo-hyoung

  Memory R&d Division Hynix Semiconductor Co.

• Cho Jung-hoon

  Memory R&d Division Hynix Semiconductor Co.

• Lee Key-min

  Memory R&d Division Hynix Semiconductor Co.

• Bae Mi-suk

  Department Of Electronics Engineering Chungnam National University

• Park Geun-suk

  Memory R&d Division Hynix Semiconductor Co.

• Park Young

  Feram Team Memory R&d Division Hynix Semiconductor Incorporated

• Park Young-jin

  Memory R&d Division Hynix Semiconductor Co.

• Lee J‐h

  Lg Electronics Inst. Technol. Seoul Kor

• Kang Keun-koo

  Department Of Physics Chungbuk Nataional University

• Yoon Ki-seok

  Memory R&d Division Hynix Semiconductor Co.

• Lee J‐h

  Wonkwang Univ. Chonpuk Kor

• Park S‐h

  Department Of Physics And Semiconductor Science Catholic University Of Daegu

• Park Seong-hyung

  Lg Semicon. Ltd.

• Lee H‐d

  Chungnam National Univ. Taejon Kor

• Park Y‐j

  Memory R&d Division Hynix Semiconductor Co.

• Ji Hee-hwan

  Department Of Electronics Engineering Chungnam National University

• Lee Ju-Hyeon

  School of Electrical Engineering, Wonkwang University

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