Effect of Microwave Pulse on the Optical Properties of Hydrogenated Amorphous Silicon Thin Films Deposited by Electron Cyclotron Resonance Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-11-15

著者

• PARK Sung

  Department of Material Science & Engineering, Gwangju Institute of Science and Technology

• Lee Joo-hyoung

  Memory R&d Division Hynix Semiconductor Co.

• Park Sung-kun

  Department Of Electronic Engineering Kyungpook National University

• Lee J‐h

  Lg Electronics Inst. Technol. Seoul Kor

• Lee J‐h

  Wonkwang Univ. Chonpuk Kor

• LEE Ju-Hyeon

  Electronic Thin Film Lab., Department of Materials Science and Engineering, Sun Moon University

• JUNG Il-Chae

  Electronic Thin Film Lab., Department of Materials Science and Engineering, Sun Moon University

• PARK Sang-Kook

  Electronic Thin Film Lab., Department of Materials Science and Engineering, Sun Moon University

• BAEK Cheong-A

  Electronic Thin Film Lab., Department of Materials Science and Engineering, Sun Moon University

• Park S‐k

  Korea Electronics Technol. Inst. Kyunggi Kor

• Jung Il-chae

  Electronic Thin Film Lab. Department Of Materials Science And Engineering Sun Moon University

• Baek Cheong-a

  Electronic Thin Film Lab. Department Of Materials Science And Engineering Sun Moon University

• Park Sang-kook

  Electronic Thin Film Lab. Department Of Materials Science And Engineering Sun Moon University

• Park Sung

  Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University

• Lee Ju-hyeon

  Electronic Thin Film Lab. Department Of Materials Science And Engineering Sun Moon University

• Lee Ju-Hyeon

  School of Electrical Engineering, Wonkwang University

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