Negative Pattern Generation Technique by Laser Beam Writing for Integrated Optics
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概要
- 論文の詳細を見る
A novel technique for fabricating negative tone patterns for waveguide devices, using laser beam writing is proposed. An optoelectronic device pattern with good contrast and a smooth curve is generated. Our proposed technique can extend the applications of laser beam writing to the fabrication of the optoelectronic devices.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1998-09-15
著者
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Kim Sun
Photonics Research Center Korea Institute Of Science And Technology
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BYUN Young
Photonic Research Center, Korea Institute of Science and Technology
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PARK Kyung
Photonics Research Center, Korea Institute of Science and Technology
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KIM Myong
Photonics Research Center, Korea Institute of Science and Technology
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Cho Wook
Department Of Physics Yonsei University
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Choi Sang
Photonics Research Center Korea Institute Of Science And Technology
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Park Sung
Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University
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Kim Ung
Department Of Physics Yonsei University
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Kim Myong
Photonics Research Center, Korea Institute of Science and Technology, Seoul, 130-650, Korea
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Choi Sang
Photonics Research Center, Korea Institute of Science and Technology, Seoul, 130-650, Korea
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Kim Ung
Department of Physics, Yonsei University, Seoul, 120-749, Korea
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Park Kyung
Photonics Research Center, Korea Institute of Science and Technology, Seoul, 130-650, Korea
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Park Sung
Department of Physics, Yonsei University, Seoul, 120-749, Korea
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Kim Sun
Photonics Research Center, Korea Institute of Science and Technology, Seoul, 130-650, Korea
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