Highly Anisotropic Etching of Tungsten-Nitride for an X-Ray Mask Absorber with an Inductively Coupled Plasma System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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KIM Sang
Department of Metallic and Materials Engineering, Gyeongsang National University
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Kim S
Photonics Research Center Korea Institute Of Science And Technology
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LEE Hong
Department of Family Medicine, School of Medicine, Ewha Womans University
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LEE Seung
Department of Dermatology and Human Barrier Research Institute, Yonsei University College of Medicin
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Kim Sun
Photonics Research Center Korea Institute Of Science And Technology
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AHN Jinho
Department of Materials Science and Engineering, Hanyang University
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Kim S
Korea Inst. Sci. And Technol. Seoul Kor
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Kim S
Hanyang Univ. Seoul Kor
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Ahn J
Materials Science And Engineering Hanyang University
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Ahn Jinho
Deptartment Of Materials Engineering Hanyang University
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Ahn Jinho
Department Of Materials Engineering Graduate School Of Advanced Materials And Chemical Engineering H
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Lee S
Department Of Materials Engineering Hanyang University
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MOON Ho
Department of Materials Engineering, Hanyang University
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SOHN Joo-Hiuk
Department of Physics, University of Seoul
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Ahn J
Department Of Materials Science & Engineering Hanyang University
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Moon H
Korea National Univ. Education Choongbuk Kor
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Sohn Joo-hiuk
Department Of Physics University Of Seoul
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Kim Sang
Department Of Chem. Eng. The University Of Seoul
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Lee Seung
Department Of Anesthesiology And Pain Medicine Dong-a University Hospital
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Lee Hong
Department Of Ceramic Engineering Yonsei University
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Lee Hong
Quantum-functional Semiconductor Research Center And Department Of Physics Dongguk University
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Lee Hong
Department Of Bio-resources And Pnu-special Animal Biotechnology Center College Of Natural Resources & Life Science Pusan National University
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KIM Sang
Department of Anesthesiology and Pain Medicine, Chosun University Medical School
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Ahn Jinho
Department of Material Science and Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
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AHN Jinho
Department of Computer Science, Kyonggi University
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KIM Sang
Department of Agricultural Biotechnology, Seoul National University
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