Spectro-ellipsometric Studies of Amorphization and Thermal Annealing in Ion-implanted Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-12-15
著者
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KIM Sang
Department of Metallic and Materials Engineering, Gyeongsang National University
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Kim S
Department Of Molecular Science And Technology Ajou University
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Kim Sang
Department Of Chem. Eng. The University Of Seoul
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LEE Soonil
Department of Physics, Ajou University
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OH Soo-ghee
Department of Physics, Ajou University
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Oh S‐g
Ajou Univ. Suwon Kor
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Lee Soonil
Department Of Molecular Science And Technology Ajou University
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Oh Soo-ghee
Department Of Physics Ajou University
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KIM Sang
Department of Anesthesiology and Pain Medicine, Chosun University Medical School
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