Preparation and Characterization of TiO_2 Thin Films on Silica Gel Powders by Plasma Enhanced Chemical Vapor Deposition in a Circulating Fluidized Bed Reactor
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概要
- 論文の詳細を見る
Plasma Enhanced Chemical Vapor Deposition (PECVD) of TiO2 thin films on silica gel powders at atmospheric pressure in a Circulating Fluidized Bed (CFB) reactor was carried out. In addition, TiO2 thin films on silica gel powders were prepared by the sol–gel method and compared with the TiO2-deposited powders by PECVD. The characteristics of those thin films were determined by X-ray diffraction spectra, Raman spectroscopy, SEM and BET. Without heat treatment, anatase phase was crystallized well by PECVD in a CFB reactor. Specific surface area of the TiO2-deposited silica gel by PECVD exhibits a larger value than that by the sol–gel method. By the PECVD method, TiO2 thin films are uniformly deposited on the external surface of silica gel.
- 社団法人 化学工学会の論文
- 2008-07-01
著者
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Kim Sang
Department Of Chem. Eng. The University Of Seoul
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Park Soung
Department Of Cosmetics & Chemical Engineering Woosuk University
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Park Soung
Department Of Biology College Of Education Kyungpook National University
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Kim Gook
Department Of Chemical And Biomolecular Engineering And Energy And Environment Research Center Korea
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Kim Gook
Department Of Chemical And Biomolecular Engineering Energy And Environment Research Center Korea Adv
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Kim Sang
Department Of Chemical And Biomolecular Engineering Energy And Environment Research Center Korea Adv
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KIM Sang
Department of Anesthesiology and Pain Medicine, Chosun University Medical School
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