Irreversible Optical Properties of AgO_x Mask Layer with Temperature for Super-Resolution Near-Field Structure Application Investigated by in situ, ex situ Ellipsometry
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-07-30
著者
-
KIM Sang
Department of Metallic and Materials Engineering, Gyeongsang National University
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Kim S
Kookmin Univ. Seoul Kor
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An Sung
Department Of Physics Ajou University
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Kim S
Department Of Molecular Science And Technology Ajou University
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LI Xuezhe
Department of Molecular Science and Technology, Ajou University
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