Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layers in Nanoscale CMOSFETs
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-30
著者
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Park S‐h
Magnachip Semiconductor Inc.
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Lee Hi-Deok
Dept. of Electronics Engineering, Chungnam National University
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PARK Sung-Hyung
Magnachip Semiconductor Inc.
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LEE Heui-Seung
Magnachip Semiconductor Inc.
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KANG Young-Seok
Magnachip Semiconductor Inc.
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KIM Dae-Byung
Magnachip Semiconductor Inc.
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JI Hee-Hwan
Dept. of Electronics Engineering, Chungnam National University
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KIM Yong-Goo
Dept. of Electronics Engineering, Chungnam National University
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WANG Jin-Suk
Dept. of Electronics Engineering, Chungnam National University
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BAEK Seong-Hak
MagnaChip Semiconductor Ltd.
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KIM Kyoung-Cheol
MagnaChip Semiconductor Ltd.
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SONG Byeung-Soo
MagnaChip Semiconductor Ltd.
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BAE Hui-Kyoung
MagnaChip Semiconductor Ltd.
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PARK Jin-Won
MagnaChip Semiconductor Ltd.
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Wang Jin
Dept. Of Electronics Engineering Chungnam National University
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Park Seong-hyun
Magnachip Semiconductor Inc.
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Lee H‐j
Magnachip Semiconductor Inc.
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Kim Y‐j
Magnachip Semiconductor Inc.
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Park Seong-hyung
Lg Semicon. Ltd.
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