Temperature effects on silicon-oxide-nitride-oxide-silicon transistors under channel hot electron injection operation (Silicon devices and materials: 第15回先端半導体デバイスの基礎と応用に関するアジア・太平洋ワークショップ(AWAD2007))
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概要
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The temperature effects on SONOS transistors are investigated. In contrast to a conventional floating-gate memory cell with Fowler-Nordheim (FN) writing, the significant drain current (read current) and the leakage current increase is observed in Channel Hot Electron Injected (CHEI) programmed SONOS cell, which results in the read window narrowing at the high temperatures. The temperature effect is found to be correlated with locally trapped charge profile, whose relation with the read window narrowing.
- 社団法人電子情報通信学会の論文
- 2007-06-18
著者
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Park S‐h
Magnachip Semiconductor Inc.
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Han In-Shik
Dept. of Electronics Engineering, Chungnam National University
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Lee Hi-Deok
Dept. of Electronics Engineering, Chungnam National University
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GOO Tae-Gyu
Dept. of Electronics Engineering, Chungnam National University
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CHOI Won-Ho
Dept. of Electronics Engineering, Chungnam National University
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LEE Ga-Won
Dept. of Electronics Engineering, Chungnam National University
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LEE Heui-Seung
Magnachip Semiconductor Inc.
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Joo Han-Soo
Dept. of Electronic Engineering, Chungnam National University
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Park Sung-Soo
Dept. of Electronic Engineering, Chungnam National University
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Yoo Ook-Sang
Dept. of Electronic Engineering, Chungnam National University
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Om Jae-Chul
Mobile & FLASH Division, Hynix Semiconductor Inc.
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Lee Seaung-Suk
Mobile & FLASH Division, Hynix Semiconductor Inc.
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Bae Gi-Hyun
Mobile & FLASH Division, Hynix Semiconductor Inc.
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Park Sung-soo
Dept. Of Electronics Engineering Chungnam National University
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Lee H‐j
Dept. Of Electronics Engineering Chungnam National University
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Lee Hi-deok
R&d Division Lg Semicon Co. Ltd.
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Lee Hi-deok
Dept. Of Electronics Engineering Chungnam National Univ.
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Lee Ga-won
Dept. Of Electronics Engineering Chungnam National University
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Joo Han-soo
Dept. Of Electronics Engineering Chungnam National University
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Bae Gi-hyun
Mobile & Flash Division Hynix Semiconductor Inc.
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Choi Won-ho
Dept. Of Electronics Engineering Chungnam National University
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Yoo Ook-sang
Dept. Of Electronics Engineering Chungnam National University
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Lee Seaung-suk
Mobile & Flash Division Hynix Semiconductor Inc.
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Om Jae-chul
Mobile & Flash Division Hynix Semiconductor Inc.
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Park Seong-hyun
Magnachip Semiconductor Inc.
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Lee H‐j
Magnachip Semiconductor Inc.
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Han In-shik
Dept. Of Electronics Engineering Chungnam National University
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Lee H‐d
Chungnam National Univ. Taejon Kor
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Han In-shik
Department Of Electronics Engineering Chungnam National University
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Park Si-ho
Chebigen Inc. 350-b. Chungmugwan Sejong University
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Goo Tae-gyu
Dept. Of Electronics Engineering Chungnam National University
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