Effects of O_2 Plasma Treatment on the Reliabilities of Metal Gate/High-k Dielectric MOSFETs

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概要

• 論文の詳細を見る
• 2007-09-19

著者

• Lee Hi-Deok

  Dept. of Electronics Engineering, Chungnam National University

• Lee Hi-deok

  Dept. Of Electronics Engineering Chungnam National Univ.

• Lee Byoung

  Sematech Tx Usa

• Kang Chang

  Sematech

• SONG Seung-Chul

  SEMATECH

• CHOI Rino

  SEMATECH

• Jeong Yoon-Ha

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology

• Jeong Yoon-ha

  Dept. Of Electronic And Electrical Engineering Pohang University Of Science And Technology

• Jeong Yoon-ha

  Dept. Of Electronic And Electrical Engineering Pohang University Of Science And Technology (postech)

• LEE Kyong

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH

• SONG Seung

  SEMATECH

• Lee Byoung

  Sematech

• Lee Kyong

  Dept. Of Electronic And Electrical Engineering Pohang University Of Science And Technology (postech)

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