New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET's
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Park S‐h
Magnachip Semiconductor Inc.
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Kim Yong
Magnachip Semiconductor Inc.
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Han In-Shik
Dept. of Electronics Engineering, Chungnam National University
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Lee Hi-Deok
Dept. of Electronics Engineering, Chungnam National University
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JI Hee-Hwan
Magnachip Semiconductor Inc.
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GOO Tae-Gyu
Dept. of Electronics Engineering, Chungnam National University
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YOU Ook-Sang
Dept. of Electronics Engineering, Chungnam National University
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CHOI Won-Ho
Dept. of Electronics Engineering, Chungnam National University
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NA Min-Ki
Dept. of Electronics Engineering, Chungnam National University
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LEE Ga-Won
Dept. of Electronics Engineering, Chungnam National University
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KIM Yong-Goo
Magnachip Semiconductor Inc.
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PARK Sung-Hyung
Magnachip Semiconductor Inc.
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LEE Heui-Seung
Magnachip Semiconductor Inc.
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KANG Young-Seok
Magnachip Semiconductor Inc.
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KIM Dae-Byung
Magnachip Semiconductor Inc.
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Park Sung-soo
Dept. Of Electronics Engineering Chungnam National University
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Lee H‐j
Dept. Of Electronics Engineering Chungnam National University
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Lee Hi-deok
R&d Division Lg Semicon Co. Ltd.
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Lee Hi-deok
Dept. Of Electronics Engineering Chungnam National Univ.
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Na Min-ki
Dept. Of Electronics Engineering Chungnam National University
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Lee Ga-won
Dept. Of Electronics Engineering Chungnam National University
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Choi Won-ho
Dept. Of Electronics Engineering Chungnam National University
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Kim Y‐c
Magnachip Semiconductor Inc.
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Yoo Ook-sang
Dept. Of Electronics Engineering Chungnam National University
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Park Seong-hyun
Magnachip Semiconductor Inc.
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Lee H‐j
Magnachip Semiconductor Inc.
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Kim Y‐j
Magnachip Semiconductor Inc.
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Han In-shik
Dept. Of Electronics Engineering Chungnam National University
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Ji Hee
Dept. Of Electronics Engineering Chungnam National University
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Ji Hee
Magnachip Semiconductor Inc.
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Kim Yong-goo
Electrical And Computer Engineering Chungnam National University
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Kim Dae
Magnachip Semiconductor Inc.
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Lee H‐d
Chungnam National Univ. Taejon Kor
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Han In-shik
Department Of Electronics Engineering Chungnam National University
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Kim D
Korea Institute For Advanced Study
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Kim Dae-byung
Dept. Of Materials Engineering Korea University Of Technology And Education
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Park Si-ho
Chebigen Inc. 350-b. Chungmugwan Sejong University
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Goo Tae-gyu
Dept. Of Electronics Engineering Chungnam National University
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