Novel Nitrogen doped Ni SALICIDE Process for Nano-Scale CMOS Technology
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Kim Yong
Magnachip Semiconductor Inc.
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Lee Hi-Deok
Dept. of Electronics Engineering, Chungnam National University
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JI Hee-Hwan
Magnachip Semiconductor Inc.
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LEE Heui-Seung
Magnachip Semiconductor Inc.
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JI Hee-Hwan
Dept. of Electronics Engineering, Chungnam National University
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WANG Jin-Suk
Dept. of Electronics Engineering, Chungnam National University
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YUN Jang-Gn
Dept. of Electronics Engineering, Chungnam National University
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OH Soon-Young
Dept. of Electronics Engineering, Chungnam National University
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HUANG Bin-Feng
Dept. of Electronics Engineering, Chungnam National University
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KIM Yong-Jin
Dept. of Electronics Engineering, Chungnam National University
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Yun Jang‐gn
Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci
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Huang Bin
Department Of Electronics Engineering Chungnam National University
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Lee H‐j
Dept. Of Electronics Engineering Chungnam National University
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Lee Hi-deok
R&d Division Lg Semicon Co. Ltd.
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Lee Hi-deok
Dept. Of Electronics Engineering Chungnam National Univ.
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Wang Jin
Dept. Of Electronics Engineering Chungnam National University
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Wang Jin-suk
Dept. Of Electronics Engineering Chungnam National University
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Kim Ui
R&d Center Magnachip Semiconductor Ltd.
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Huh Sang
R&d Center Magnachip Semiconductor Ltd.
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Cha Han
R&d Center Magnachip Semiconductor Ltd.
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Kim Y‐c
Magnachip Semiconductor Inc.
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Lee J‐g
System Ic R & D Division Hynix Semiconductor Inc.
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Lee Jeong-gun
R&d Center Lg Industrial Systems Co. Ltd.
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Lee H‐j
Magnachip Semiconductor Inc.
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Kim Y‐j
Magnachip Semiconductor Inc.
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Ji Hee
Dept. Of Electronics Engineering Chungnam National University
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Kim Yong-jin
Dept. Of Electronics Engineering Chungnam National University
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KIM Ui-Sik
System IC R&D Division, Hynix Semiconductor Inc.
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CHA Han-Sub
System IC R&D Division, Hynix Semiconductor Inc.
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HEO Sang-Bum
System IC R&D Division, Hynix Semiconductor Inc.
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LEE Jeong-Gun
System IC R&D Division, Hynix Semiconductor Inc.
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Ji Hee
Magnachip Semiconductor Inc.
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Kim Yong-goo
Electrical And Computer Engineering Chungnam National University
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Lee Jeong-gun
System Ic R & D Division Hynix Semiconductor Inc.
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Lee H‐d
Chungnam National Univ. Taejon Kor
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Yun Jang
Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu
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Oh Soon
Dept. Of Electronics Engineering Chungnam National University
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Yur Jang-gn
School Of Electrical Engineering Seoul National University
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