Abnormal Oxidation of Nickel Silicide on N-Type Substrate and Effect of Preamorphization Implantation

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概要

• 論文の詳細を見る
• 2004-10-15

著者

• Park S‐h

  Magnachip Semiconductor Inc.

• JI Hee-Hwan

  Magnachip Semiconductor Inc.

• LEE Heui-Seung

  Magnachip Semiconductor Inc.

• YUN Jang-Gn

  Department of Electronics Engineering, Chungnam National University

• OH Soon-Young

  Department of Electronics Engineering, Chungnam National University

• JI Hee-Hwan

  Department of Electronics Engineering, Chungnam National University

• HUANG Bin-Feng

  Department of Electronics Engineering, Chungnam National University

• PARK Young-Ho

  Department of Electronics Engineering, Chungnam National University

• WANG Jin-Suk

  Department of Electronics Engineering, Chungnam National University

• PARK Seong-Hyung

  System IC R&D Center, Hynix Semiconductor Inc.

• BAE Tae-Sung

  Korea Basic Science Institute

• LEE Hi-Deok

  Department of Electronics Engineering, Chungnam National University

• Yun Jang‐gn

  Inter-university Semiconductor Research Center And School Of Electrical Engineering And Computer Sci

• Huang Bin

  Department Of Electronics Engineering Chungnam National University

• Lee Hi-deok

  Department Of Electronics Engineering Chungnam National University

• Wang Jin

  Dept. Of Electronics Engineering Chungnam National University

• Wang Jin-suk

  Department Of Electronics Engineering Chungnam National University

• Park Young-ho

  Department Of Electronics Engineering Chungnam National University

• Park Seong-hyun

  Magnachip Semiconductor Inc.

• Lee H‐j

  Magnachip Semiconductor Inc.

• Ji Hee

  Dept. Of Electronics Engineering Chungnam National University

• Ji Hee

  Magnachip Semiconductor Inc.

• Park Seong-hyung

  Lg Semicon. Ltd.

• Yun Jang

  Inter-university Semiconductor Research Center (isrc) And School Of Electrical Engineering And Compu

• Park Seong-hyung

  System Ic R&d Division Hynix Semiconductor

• Park Si-ho

  Chebigen Inc. 350-b. Chungmugwan Sejong University

• Oh Soon

  Dept. Of Electronics Engineering Chungnam National University

• Ji Hee-hwan

  Department Of Electronics Engineering Chungnam National University

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