Random Telegraph Signals in Two-Dimensional Array of Si Quantum Dots

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概要

• 論文の詳細を見る

• Silicon-quantum-dots (Si-QDs) with an areal density as high as 〜10^<12>cm^<-2> were self-assembled on thermally-grown SiO_2 by low pressure CVD using Si_2H_6, in which OH-terminated SiO_2 surface prior to the Si CVD was exposed to GeH_4 to create nucleation sites uniformly. After thermal oxidation of Si-QDs surface, two-dimensional electronic transport through the Si-QDs array was measured with co-planar Al electrodes evaporated on the array surface. Random telegraph signals were clearly observed at constant applied bias conditions in dark condition and under light irradiation at room temperature. The result indicates the charging and discharging of a dot adjacent to the percolation current path in the dots array.

• 社団法人電子情報通信学会の論文
• 2009-06-17

著者

• MAKIHARA Katsunori

  Hiroshima University

• IKEDA Mitsuhisa

  Hiroshima University

• MIYAZAKI Seiichi

  Hiroshima University

• Makihara Katsunori

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Ikeda Mitsuhisa

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Miyazaki Seiichi

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Makihara Katsunori

  Hiroshima Univ. Higashihiroshima‐shi Jpn

• KAWANAMI Akira

  Hiroshima University

• Kawanami Akira

  Hiroshima Univ. Higashihiroshima‐shi Jpn

• Miyazaki Seiichi

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Miyazaki Seiichi

  Hiroshima Univ.

• Kawanami Akira

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Makihara Katsunori

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Miyazaki Seiichi

  Graduate School Of Advanced Sciences And Matters Hiroshima University

• Ikeda Mitsuhisa

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Makihara Katsuonri

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Miyazaki Seiichi

  Graduate School Of Engineering Nagoya University

• Makihara Katsunori

  Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Ikeda Mitsuhisa

  Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Miyazaki Seiichi

  Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

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