Highly-Crystallized Ge:H Film Growth from GeH

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概要

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• We prepared Ni nanodots (Ni-NDs) by exposing ultrathin Ni films to very high frequency inductively-coupled plasma (VHF-ICP) of pure H<inf>2</inf>without any external heating and demonstrated the feasibility of introducing Ni-NDs for subsequent Ge film growth with high crystallinity. A {\sim}2.0-nm-thick Ni film/quartz was exposed to H<inf>2</inf>plasma generated by inductive coupling with an external single-turn antenna connected to a 60-MHz power generator, and a Ge film was subsequently grown from GeH<inf>4</inf>VHF-ICP. When the Ge film was grown on Ni-NDs from GeH<inf>4</inf>VHF-ICP at 250 °C, the growth of highly crystallized Ge films with crystallinity as high as 95% at a rate as high as {\sim}15 nm/s, being {\sim}2 times higher than the rate obtained by VHF-ICP without Ni-NDs, was realized without an amorphous phase near the Ge film/quartz substrate interface. This result is attributed to heat generation due to the efficient recombination of atomic hydrogen on the Ni surface and heat transfer from the NDs to the precursors for the Ge film adsorbed on the Ni-NDs at the initial stage of VHF-ICP from GeH<inf>4</inf>diluted with H<inf>2</inf>to initiate crystalline nucleation and growth.

• The Japan Society of Applied Physicsの論文
• 2013-11-25

著者

• Miyazaki Seiichi

  Graduate School Of Advanced Sciences And Matters Hiroshima University

• Makihara Katsunori

  Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Ikeda Mitsuhisa

  Graduate School of Advanced Science and Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Higashi Seiichiro

  Graduate School of Advanced Science of Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Gao Jin

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Sakaike Kouhei

  Graduate School of Advanced Science of Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Hayashi Shohei

  Graduate School of Advanced Science of Matter, Hiroshima University, Higashihiroshima, Hiroshima 739-8530, Japan

• Deki Hidenori

  Faculty of Engineering, Hiroshima Kokusai Gakuin University, Hiroshima 739-0321, Japan

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