Etch Damage of n^+ Poly-Si Gate Side Wall as Evaluated by Gate Tunnel Leakage Current

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概要

• 論文の詳細を見る
• 2000-08-28

著者

• Miyazaki Seiichi

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• Miyazaki S

  Hiroshima Univ. Higashi‐hiroshima Jpn

• Miyazaki Seiichi

  Dept. Of Electrical Engineering Hiroshima University

• Miyazaki Seiichi

  Faculty Of Engineering Hiroshima University

• Murakami H.

  Graduate School of Advanced Sciences of Matter, Hiroshima University

• MURAKAMI H.

  Department of Physics, Rikkyo University

• Miyazaki S

  Department Of Electrical Engineering Hiroshima University

• Murakami H

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• Miyazaki S

  Graduate School Of Advanced Sciences Of Matter Hiroshima University

• MIYAZAKI S.

  Department of Electrical Engineering, Hiroshima University

• HIROSE M.

  Department of Electrical Engineering, Hiroshima University

• MIHARA T.

  Department of Electrical Engineering, Hiroshima University

• Hirose M.

  Department Of Electrical Engineering Hiroshima University

• Murakami H.

  Department Of Physics Rikkyo University

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