An Efficient Improvement for Barrier Effect of W-Filled Contact
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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Tsai Ming-hsing
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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YEH Wen-Kuan
Department of Electrical Engineering, National University of Kaohsiung
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CHANG Ting-Chang
Department of Physics, National Sun Yat-Sen University
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CHEN Mao-Chieh
Department of Electronics Engineering & The Institute of Electronics, National Chiao Tung University
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CHEN Sheng-Hsiung
Department of Electronics Engineering and Inst. of Electronics, National Chiao Tung University
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Yeh Wen-kuan
Department Of Electrical Engineering National University Of Kaohsiung
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Yeh W‐k
National Univ. Kaohsiung Kaohsiung Twn
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CHAN Kuang-Yang
Department of Electronics Engineering, National Chiao Tung University and National Nano Device Labor
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LIN Mou-Shiung
Taiwan Semiconductor Manufacture Company
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Lin Mou-shiung
Asia Pacific Microsystems Inc.
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Chan K‐y
Nankai Univ. Tianjin Chn
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Chang Ting-chang
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Lin Mou-shiung
Taiwan Semiconductor Manufacturing Company
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Chan Kuang-yang
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Yeh Wen-kuan
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Chen Mao-chieh
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Chen Sheng-hsiung
Department Of Electrical Engineer Tung Fang Institute Of Technology
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Chen Sheng-hsiung
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Chang Ting-chang
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Tsai Ming-hsing
Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora
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Tsai Ming-Hsing
Department of Electronic Engineering, National University of Kaohsiung, No. 700, Kaohsiung University Road, NanTzu District, Kaohsiung, Taiwan 811, R.O.C.
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