An Efficient Improvement for Barrier Effect of W-filled Contact

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概要

• 論文の詳細を見る
• 1996-02-01

著者

• Tsai Ming-hsing

  Department Of Electronics Engineering National Chiao Tung University And National Nano Device Labora

• YEH Wen-Kuan

  Department of Electrical Engineering, National University of Kaohsiung

• CHANG Ting-Chang

  Department of Physics, National Sun Yat-Sen University

• CHEN Mao-Chieh

  Department of Electronics Engineering & The Institute of Electronics, National Chiao Tung University

• CHEN Sheng-Hsiung

  Department of Electronics Engineering and Inst. of Electronics, National Chiao Tung University

• Yeh W‐k

  National Univ. Kaohsiung Kaohsiung Twn

• CHAN Kuang-Yang

  Department of Electronics Engineering, National Chiao Tung University and National Nano Device Labor

• LIN Mou-Shiung

  Taiwan Semiconductor Manufacture Company

• Lin Mou-shiung

  Asia Pacific Microsystems Inc.

• Chan K‐y

  Nankai Univ. Tianjin Chn

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