Technological Breakthroughs in Growth Control of Silicon Carbide for High Power Electronic Devices
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概要
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Technological breakthroughs in growth control of SiC are reviewed. Step-controlled epitaxy by using off-axis SiC {0001} substrates to grow high-quality epitaxial layer is explained in detail. The introduction of substrate off-angles brings step-flow growth, which easily makes polytype replication of SiC at rather low temperatures. Off-angle dependence, rate-determining processes, and temperature dependence of growth rate are discussed. Prediction, whether step-flow growth or two-dimensional nucleation does occur, is given as a function of off-angle, growth temperature, and growth rate. Optical and electrical properties of undoped epitaxial layers are characterized. Impurity doping during the growth is explained. Recent progresses in peripheral technologies for realization of power electronic devices, such as bulk growth, epitaxial growth, ion implantation, MOS interface, ohmic contacts, are introduced. Finally application to high-power electronic devices is briefly described.
- 2004-10-15
著者
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Matsunami Hiroyuki
Department Of Eectrical Engineering Kyoto University
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Matsunami Hiroyuki
Department of Electronic Science and Engineering, Kyoto University, 1 Kyotodaigaku-Katsura, Nishikyo-ku, Kyoto 615-8501, Japan
関連論文
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- Undoped Silicon Layers Grown by Gas Source Molecular Beam Epitaxy Using Si_2H_6
- Interface Modification by Hydrocarbon Gas Molecular Beams in Heteroepitaxy of SiC on Si
- Scanning Capacitance and Spreading Resistance Microscopy of SiC Multiple-pn-Junction Structure : Semiconductors
- Correspondence between Surface Morphological Faults and Crystallographic Defects in 4H-SiC Homoepitaxial Film
- Defect Formation in (0001)- and (1120)-Oriented 4H-SiC Crystals P^+-Implanted at Room Temperature
- Homoepitaxial Chemical Vapor Deposition of 6H-SiC at Low Temperatures on {011^^-4} Substrates
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- Deep Interface States in SiO_2/p-type α-SiC Structure
- Effect of C/Si Ratio on Spiral Growth on 6H-SiC (0001)
- High-Voltage 4H-SiC Schottky Barrier Diodes Fabricated on (033^^-8) with Closed Micropipes
- High-Sensitivity Analysis of Z_1 Center Concentration in 4H-SiC Grown by Horizontal Cold-Wall Chemical Vapor Deposition
- Surface Morphological Structures of 4H-, 6H- and 15R-SiC (0001) Epitaxial Layers Grown by Chemical Vapor Deposition
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- Photoluminescence of 3C-SiC Epilayers Grown on Lattice-Matched Substrates
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- Cd_3As_2 Thin Film Magnetoresistor
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