Nondestructive and Noncontact Observation of Microdefects in GaAs Wafers with a New Photo-Thermal-Radiation Microscope
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-11-20
著者
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Fukuda Tsuguo
Optoelectronics Joint Research Laboratory
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TSUBOUCHI Kazuo
Research Institute of Electrical Communication, Tohoku University
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Mikoshiba N
Research Institute Of Electrical Communication Tohoku University:(present Address) Hewlett-packard L
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Mikoshiba Nobuo
Research Institute Of Electrical Communication Tohoku University:(present Address) Hewlett-packard L
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Mikoshiba Nobuo
Research Institute Of Electrical Communication Tohoku University
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Tsubouchi K
Tohoku Univ. Sendai Jpn
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Tsubouchi Kazuo
Research Institute Of Electrical Communicaiton Tohoku University
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NAKAMURA Hiromichi
Research Institute of Electrical Communication, Tohoku University
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Mikoshiba Nobuo
Research Institute Of Electorical Communication Tohoku University
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TSUBOUCHI Kazuo
Research Institute of Electric Communication (RIEC), Tohoku University
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