Development of Scanning μ-RHEED Microscopy for Imaging Polycrystal Grain Structure in LSI (SOLID STATE DEVICES AND MATERIALS 1)

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-11-20

著者

• Masu K

  Research Institute Of Electrical Communication Tohoku University

• Masu Kazuya

  Integrated Research Institute

• Masu Kazuya

  Research Institute Of Electrical Communication Tohoku University

• Ohmi Tadahiro

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• TSUBOUCHI Kazuo

  Research Institute of Electrical Communication, Tohoku University

• Mikoshiba N

  Research Institute Of Electrical Communication Tohoku University:(present Address) Hewlett-packard L

• Mikoshiba Nobuo

  Research Institute Of Electrical Communication Tohoku University:(present Address) Hewlett-packard L

• Mikoshiba Nobuo

  Research Institute Of Electrical Communication Tohoku University

• Matano Tatsuya

  Research Institute Of Electrical Communication Tohoku University

• Ohmi Tadahiro

  Department Of Electronic Engineering

• Tsubouchi K

  Tohoku Univ. Sendai Jpn

• Hiura Yohei

  Research Institute of Electrical Communication, Tohoku University

• TANAKA Masanori

  Research Institute of Electrical Communication, Tohoku University

• HAYASHI Shigeki

  Shimadzu Corporation

• MARUI Takao

  Shimadzu Corporation

• TERAMOTO Akira

  Shimadzu Corporation

• KAJIKAWA Tetsuo

  Shimadzu Corporation

• SOEJIMA Hiroyoshi

  Shimadzu Corporation

• Hiura Y

  Research Institute Of Electrical Communication Tohoku University:(present Address) Toshiba Corp.

• Tsubouchi Kazuo

  Research Institute Of Electrical Communicaiton Tohoku University

• Mikoshiba Nobuo

  Research Institute Of Electorical Communication Tohoku University

• TSUBOUCHI Kazuo

  Research Institute of Electric Communication (RIEC), Tohoku University

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