Preoxide-Controlled Oxidation for Very Thin Oxide Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-01-30

著者

• MORITA Mizuho

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

• Ohmi Tadahiro

  Department Of Electronic Engineering Graduate School Of Engineering Tohoku University

• Morita M

  Department Of Electronics Tohoku University

• Morita Mizuho

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Morita M

  Advanced Materials & Technology Research Laboratories Nippon Steel Corporation

• NAKAMURA Kou

  Department of Electronic Engineering, Faculty of Engineering, Tohoku University

• MAKIHARA Koji

  Department of Electronic Engineering, Faculty of Engineering, Tohoku University

• KWON Myoung

  Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology

• Kwon Myoung

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• TERAMOTO Akinobu

  Department of Electronic Engineering, Faculty of Engineering, Tohoku University

• Teramoto Akinobu

  Ulsi Laboratory Mitsubishi Electric Corporation

• Teramoto Akinobu

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Ohmi Tadahiro

  Department Of Electronic Engineering

• Makihara K

  Department Of Electronics Tohoku University

• Makihara Koji

  Department Of Applied Chemistry Graduate School Of Engineering Kyushu University

• Teramoto Akinobu

  University Of Tohoku New Industry Creation Hatchery Center (niche)

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