Reaction of Hydrogen-Terminated Si(100) Surfaces with Oxygen at Very Low Pressures during Heating
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概要
- 論文の詳細を見る
Reactions of hydrogen-terminated Si(100) surfaces with oxygen at very low pressures during heating are characterized by a method that combines heating and cooling in thermal desorption spectroscopy. Surface hydrogen coverage as a function of temperature is estimated from the hydrogen desorption spectrum obtained by the combination measurement. The surface coverage under the condition with or without introducing oxygen gas indicates that the hydrogen of silicon monohydride begins to desorb after almost half the hydrogen of silicon dihydride desorbs. The hydrogen desorption behavior under the introduction of oxygen gas suggests that bonding between Si and hydrogen atoms for silicon monohydride at the Si(100) surface is stabilized by adsorption of oxygen atoms on surface Si back bond sites during heating.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-11-15
著者
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MORITA Satoru
Department of Radiology, Tokyo Womens Medical University Medical Center East
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MORITA Mizuho
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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Nishimura Kazuo
Department Of Urology Osaka University Graduate School Of Medicine
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Morita Mizuho
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Morita Mizuho
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Morita Satoru
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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URABE Shinichi
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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Nishikawa Syuhei
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-
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Urabe Shinichi
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Morita Satoru
Department Of Cardiovascular Surgery National Hospital Organization Higashihiroshima Medical Center
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Nishikawa Syuhei
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Nishimura Kazuo
Department Of Precision Science And Technology Graduate School Of Engineering Osaka University
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Nishimura Kazuo
Department Of Agricultural Chemistry Faculty Of Agriculture Kyoto University
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