Native Oxide Growing Behavior on Si Crystal Structure and Resistivity
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概要
- 論文の詳細を見る
- 1996-08-26
著者
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MORITA Mizuho
Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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Ohmi Tadahiro
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Ohmi Tadahiro
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Morita Mizuho
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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SEKINE Katsuyuki
Department of Electronic Engineering, Graduate school of Engineering, Tohoku University
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Ohmi Tadahiro
Department Of Electronic Engineering
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Choi Geun-min
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University
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Sekine Katsuyuki
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Choi Geun-min
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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