Contamination-Free Physical Resist Stripping by Megasonic/IPA/Fluoride Enhanced Life-off Processing
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概要
- 論文の詳細を見る
- 1996-08-26
著者
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Ohmi Tadahiro
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Ohmi Tadahiro
Department Of Electronic Engineering
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Ojima Senri
Development Div. Nomura Micro Science Co. Ltd.
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JIZAIMARU Takayuki
Department of Electronic Engineering, Faculty of Engineering, Tohoku University
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OMAE Syunkichi
Department of Electronic Engineering, Faculty of Engineering, Tohoku University
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Omae Syunkichi
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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Jizaimaru Takayuki
Department Of Electronic Engineering Faculty Of Engineering Tohoku University
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