Reaction Characteristics between Cu Thin Film and RF Inductively Coupled Cl_2 Plasma without/with UV Irradiation

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-07-15

著者

• Lee Jeong

  Department of Obstetrics and Gynaecology, College od Medicine, Soonchunhyang University

• CHOI Kang-Sik

  Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

• HAN Chul-Hi

  Department of Electrical Engineering, Korea Advanced Institute of Science and Technology

• Choi K‐s

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology

• KWON Myoung

  Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology

• Kwon M

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Kwon Myoung

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Choi Kang-sik

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology:lg Semicon C

• Han Chul-hi

  Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology

• Lee Jeong

  Department Of Clothing And Textiles Gyeongsang National University

• Lee Jeong

  Department Of Anesthesiology And Pain Medicine Yonsei University College Of Medicine

関連論文

• IS-84 Contraception in reproductive-aged Korean women(Group11 Women's Health2,International Session)
• Study on the Shape Memory Polyamides. Synthesis and Thermomechanical Properties of Polycaprolactone- Polyamide Block Copolymer
• Low-Temperature Plasma Etching of Copper Films Using Ultraviolet Irradiation
• Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors
• Suppression of Leakage Current in n-Channel Polysilicon Thin-Film Transistors Using NH_3 Annealing
• Crystal Structure of a Methine Dye, C.I. Disperse Blue 354
• Crystal Structure of N-tert-Butoxycarbonylbis(2-thioacetoxyethyl)amine
• Crystal Structure of 8-Tosyloxyquinoline
• Crystal Structure of an Anthraquinone Dye, C. I. Disperse Violet 27
• Effect of Alkoxy Substitution on Photophysical Properties of Poly(p-phenylenevinylene)
• Endurance Characteristics and Degradation Mechanism of Polysilicon Thin Film Transistor EEPROMs with Electron Cyclotron Resonance N_2O-Plasma Gate Oxide
• High-Performance EEPROMs Using N- and P-Channel Poly-Si TFTs with ECR N2O-Plasma Oxide
• Effect of Bottom Polysilicon Doping on the Reliability of Interpoly Oxide Grown Using Electron Cyclotron Resonence N_2O-Plasma
• Short Channel Effects in N- and P-Channel Polycrystalline Silicon Thin Film Transistors with Very Thin Electron Cyclotron Resonance N_2O-Plasma Gate Dielectric
• Highly Reliable Interpoly Oxide Using ECR N_2O-Plasma for Next Generation Flash Memory
• Reaction Characteristics between Cu Thin Film and RF Inductively Coupled Cl_2 Plasma without/with UV Irradiation
• Protective Immunity Against Challenge Infection with Trichinella spiralis in the Rat
• 30-P2-45 Computerized Adverse Drug Reaction (ADR) monitoring system in Kangnam St. Mary's Hospital
• Cancer screening using ^F-FDG PET/CT in Korean asymptomatic volunteers : a preliminary report
• Influence of the Microstructure on the Ultrasonic Backscattered Energy from a Liquid/Solid Interface at the Rayleigh Angle
• Preoxide-Controlled Oxidation for Very Thin Oxide Films
• Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist
• Homogeneous Nucleation of Misfit Dislocations in Strained Layers
• Crystal Structure and B-Site Ordering in Antiferroelectric Pb(Mg_W_)O_3, Pb(Co_W_)O_3 and Pb(Yb_Nb_)O_3
• Anti-obesity Effect of Dioscorea nipponica Makino with Lipase-inhibitory Activity in Rodents(Food & Nutrition Science)
• Epitaxial Growth of GaN on LaAlO_3(100) Substrate by RF Plasma Assisted Molecular Beam Epitaxy
• Molecular Authentication of 21 Korean Artemisia Species (Compositae) by Polymerase Chain Reaction-Restriction Fragment Length Polymorphism Based on trnL–F Region of Chloroplast DNA
• Design of a Mutated Adder and Its Optimization Using ILP Formulation(Digital Circuits and Computer Arithmetic, Recent Advances in Circuits and Systems-Part 1)
• Low Latency Four-Flop Synchronizer with the Handshake Interface(Communications and Wireless Systems, Recent Advances in Circuits and Systems-Part 1)
• A Low Latency Asynchronous FIFO Combining a Wave Pipeline with a Handshake Scheme(VLSI Design Technology and CAD)
• Asynchronous Multiple-Issue On-Chip Bus with In-Order/Out-of-Order Completion(Integrated Electronics)
• Differential Value Encoding for Delay Insensitive Handshake Protocol(Communications and Wireless Systems, Recent Advances in Circuits and Systems-Part 1)
• Al-Induced Crystallization of an Amorphous Si Thin Film in a Polycrystalline Al/Native SiO_2/Amorphous Si Structure
• Novel keratin 5 mutations in epidermolysis bullosa simplex : Cases with unusual genotype-phenotype correlation
• Keratin 17 mutation in pachyonychia congenita type 2 patient with early onset steatocystoma multiplex and Hutchinson-like tooth deformity
• Microstructure and Electrical Properties of Tantalum Oxide Thin Film Prepared by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition
• Ectopic Expression of a Foreign Aquaporin Disrupts the Natural Expression Patterns of Endogenous Aquaporin Genes and Alters Plant Responses to Different Stress Conditions
• Maternal steroid enhancement of fetal rabbit gastrointestinal motility
• A Case of Mucinous Cystadenocarcinoma of the Appendix : Difficult Preoperative Differentiation from an Ovarian Tumor
• P3-IS-69 Comparison of Laparoscopically Assisted Vaginal Hysterectomy (LAVH) with Total Abdominal Hysterectomy (TAH)(Group93 Reproduction3,International Session)
• P3-IS-36 Clinical analysis of Non-blood transfusion treatment in patients who refused a blood transfusion for Obstetrical Part(Group89 Perinatology+Women's Health1,International Session)
• 15-27.Study on the Factor V Leiden Mutation in Pregnant Women and Relationship with Preeclampsia Severe Form (Session 17 Perinatology 6)
• 14-12.The study of comparison of first and second trimester screening for fetal anomalies (Session 15 Perinatology 4)
• Prerequisite for Photoluminescence D Line Spectra of Heat-Treated Carbon-Lean Czochralski Silicon Crystals
• Low-Temperature Crystallization of Amorphous Si Films by Metal Adsorption and Diffusion
• New Crystallization Process of LPCVD a-Si Films below 530℃ Using Metal Adsorption Method
• Novel and recurrent mutations in Keratin 5 and 14 in Korean patients with Epidermolysis bullosa simplex
• The Effect of Stress on Solid-Phase Epitaxial RegroWth in As^+ -Implanted Two-Dimensional Amorphized Si : Semiconductors
• Substrate Resistance Effect on Charge-Pumping Current in Polycrystalline Silicon Thin Film Transistors
• Effects of Annealing Conditions on the Crystallization and Grain Growth of Metastable Ge_2Sb_2Te_5
• Adenomyoma of the small intestine : Report of two cases and review of the literature
• Simultaneous and Accurate Formation of Variously Shaped Holes in Silicon Substrate
• Usefulness of a malleable penile prosthesis in patients with a spinal cord injury
• New Fabrication Process of Single-Crystalline Silicon Islands Using Double Diffusion : Application to a Heating Resistor of a Thermal Inkjet Printhead
• Advancement in HCC imaging : diagnosis, staging and treatment efficacy assessments : Imaging diagnosis and staging of hepatocellular carcinoma
• Tolterodine : As effective but better tolerated than oxybutynin in Asian patients with symptoms of overactive bladder
• Inhibition of ganglioside GD1a synthesis suppresses the differentiation of human mesenchymal stem cells into osteoblasts
• Observation of CuPt-Type Ordered Structure in CdZnTe during Organometallic Vapor Phase Epitaxial Growth
• Identification of a Cryptic N-Terminal Signal in Saccharomyces cerevisiae Peroxisomal Citrate Synthase That Functions in Both Peroxisomal and Mitochondrial Targeting^1
• Surface Morphologies of BaTiO_3 Thin Films by Atomic Force Mieroscopy
• Quantitative evaluations of a high-voltage multiscan CCD camera
• Mutational and Functional Analysis of the Cryptic N-Terminal Targeting Signal for Both Mitochondria and Peroxisomes in Yeast Peroxisomal Citrate Synthase Cit2p
• The comparison of ^I whole-body scans on the third and tenth day after ^I therapy in patients with well-differentiated thyroid cancer : preliminary report
• Effect of Hydroxyethyl Starch 130/0.4 on Blood Loss and Coagulation in Patients With Recent Exposure to Dual Antiplatelet Therapy Undergoing Off-Pump Coronary Artery Bypass Graft Surgery
• Association between bone mineral density and metabolic syndrome in pre- and postmenopausal women
• Determination of L-Ascorbate by Electrocatalytic Oxidation on 1, 5, 8, 12-Tetraaza-2, 4, 9, 11-tetramethylcyclotetradecinatonickel(II) Polymer Modified Glassy Carbon Electrode
• Transmission Electron Microscopy Study on the Crystallization of Sb–Se–Te Ternary Alloys
• Orbital Lymphangioma Treated by Lateral Wall Decompression and Fat Removal
• Lung injury induced by the pulmonary instillation of povidone-iodine in rats
• Metabolism of Ginsenoside Rb1 by Human Intestinal Microflora and Cloning of Its Metabolizing β-D-Glucosidase from Bifidobacterium longum H-1
• Fast Myoglobin Detection Using Nanofluidic Electrokinetic Trapping Technique
• Microstructural Investigation of SexTe100-x Thin Films Deposited on Si(100) Substrates by X-ray Diffractometer and Transmission Electron Microscopy Analysis
• Effects of Annealing Conditions on the Crystallization and Grain Growth of Metastable Ge2Sb2Te5
• Well-Aligned Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition of Acetylene on Cobalt Nanoparticles
• Phase Transition Behavior of Ge–Bi–Te Thin Films from an NaCl to Rhombohedral Structure
• Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors
• ISP-12-3 Study of actual condition of smoking during pregnancy in 2003 and 2010(Group 12 Perinatology-3,IS Poster,International Session)
• ISP-10-4 Placental 11β-hydroxysteroid dehydrogenase type 2 mRNA expression in low birth weight newborn at birth(Group 10 Perinatology-1,IS Poster,International Session)
• Determination of Liquid Density and Viscosity Using a Self-Actuating Microcantilever
• Serotyping and Antimicrobial Susceptibility of Salmonella spp.: Nationwide Multicenter Study in Korea
• Left Ventricular Hypertrophy, Diastolic Dysfunction, Pulse Pressure, and Plasma ET-1 in Marathon Runners With Exaggerated Blood Pressure Response
• Comparison of diagnostic ability between ^Tc-MDP bone scan and ^F-FDG PET/CT for bone metastasis in patients with small cell lung cancer
• Substrate Resistance Effect on Charge-Pumping Current in Polycrystalline Silicon Thin Film Transistors
• Publisher's Note: "Well-Aligned Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition of Acetylene on Cobalt Nanoparticles"
• P-11 Synthesis of Fullerene-Silver Nanoparticle with Various Surfactants under Ultrasonic Irradiation(Poster Presentations)
• Fast Myoglobin Detection Using Nanofluidic Electrokinetic Trapping Technique
• P-10 Preparation of Fullerene-Gold Nanoparticle with Various Surfactants under Ultrasonic Irradiation(Poster Presentations)
• Early response of patients undergoing concurrent chemoradiotherapy for cervical cancer : a comparison of PET/CT and MRI
• Identification of a Cryptic N-Terminal Signal in Saccharomyces cerevisiae Peroxisomal Citrate Synthase That Functions in Both Peroxisomal and Mitochondrial Targeting.
• Nd:YVO

もっと見る 閉じる

スポンサーリンク