Microstructural Investigation of SexTe100-x Thin Films Deposited on Si(100) Substrates by X-ray Diffractometer and Transmission Electron Microscopy Analysis
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概要
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The microstructural properties of SexTe100-x ($x=16,29,38$) thin films are investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis. SexTe100-x thin films have a Te hexagonal structure and Te{011} interplanar spacing decreases because some Se atoms occupy Te atomic sites, forming Se helical chains within the Te helical chains. By increasing the Se contents from 16 to 29 at. %, Se5.95Te1.05 monoclinic and Se hexagonal structures coexist in a grain and at 38 at. %, a Se hexagonal structure is observed within the Te hexagonal grain. This means that SexTe100-x thin films maintain the Te hexagonal structure and that phase separation does not occur owing to the short diffusion time.
- 2007-11-15
著者
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Kim Yong
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
-
Kim Eun
Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University
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Lee Jeong
Department Of Anesthesiology And Pain Medicine Yonsei University College Of Medicine
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