Advantages of RuO_x Bottom Electrode in the Dielectric and Leakage Characteristics of (Ba,Sr)TiO_3 Capacitor
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-12-15
著者
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LEE Chang
Department of Oral Biology, Yonsei University College of Dentistry
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Kim Yong
Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology
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Kim Yong
Semiconductor Devices Laboratory Korea Institute Of Science And Technology
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Lee Chang
Department Of Physics Kookmin University
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Lee Chang
Department Of Animal Science Utsunomiya University
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Lee Chang
Departlnent Of Biology College Of Natural Sciences Kyungpook National University Korea
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