N_2^+ Implantation Approaches for Improving Thermal Stability of Cu/Mo/Si Contact Structure

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-05-15

著者

• Kim Yong

  Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology

• Park J‐w

  Pusan National Univ. Busan Kor

• Kim Y

  Semiconductor Materials And Devices Laboratory Korea Institute Of Science And Technology

• PARK Jong-Wan

  Department of Physics, Chungbuk National University

• Kim Y‐h

  Semiconductor Devices Laboratory Korea Institute Of Science And Technology

• Kim Yong

  Semiconductor Devices Laboratory Korea Institute Of Science And Technology

• Kim D

  Semiconductor Materials Laboratory Korea Institute Of Science And Technology

• Kim Dong

  Semiconductor Materials Research Center Korea Institute Of Science And Technology

• Park Jong-wan

  Department Of Metallugical Engineering Hanyang University

• Kim Dong

  Semiconductor Materials Laboratory Korea Institute Of Science And Technology

• Kim Yong

  Korea Institute Of Science And Technology

• Park J‐w

  Department Of Pharmacology Seoul National University College Of Medicine

• Kim Dong

  Semiconductor Lab, Samsung Advanced Institute of Technology, Samsung Electronics, Gyeonggi-do 446-712, Korea

• PARK Jong-Wan

  Department of Biomedical Sciences, Seoul National University, College of Medicine

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