Diffusion Barrier Property of Molybdenum Nitride Films for Copper Metallization

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-08-15

著者

• Park J‐w

  Pusan National Univ. Busan Kor

• PARK Jong-Wan

  Department of Physics, Chungbuk National University

• LEE Jeong-Youb

  Department of Metallurgical Engineering, Hanyang University

• Lee Jeong-youb

  Department Of Metallurgical Engineering Hanyang University

• Park Jong-wan

  Department Of Metallugical Engineering Hanyang University

• Park J‐w

  Department Of Pharmacology Seoul National University College Of Medicine

• PARK Jong-Wan

  Department of Biomedical Sciences, Seoul National University, College of Medicine

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